Vk. Sabhapathi et al., OPTICAL-ABSORPTION STUDIES IN MOLYBDENUM TRIOXIDE THIN-FILMS, Physica status solidi. a, Applied research, 148(1), 1995, pp. 167-173
Thin films of molybdenum trioxide are prepared by the electron beam ev
aporation technique onto glass substrates maintained at temperatures i
n the range 303 to 523 K. The effect of substrate temperature and oxyg
en partial pressure on the structure and optical properties of MoO3 fi
lms is investigated. The as-deposited films show alpha-beta mixed phas
e. Both the films formed at 523 K in an oxygen partial pressure of 26.
6 x 10(-3) Pa and the films formed at 523 K and heat treated in air ex
hibit the orthorhombic alpha-phase with optical band gap 3.25 and 3.2
eV, respectively.