MILLIMETER-WAVE ON-WAFER WAVE-FORM AND NETWORK MEASUREMENTS USING ACTIVE PROBES

We have fabricated active probes for on-wafer waveform and network mea surements. The probes incorporate GaAs nonlinear transmission line (NL TL) based network analyzer (NWA) integrated circuits and low-loss quar tz coplanar-waveguide probe tips, The active probes show step response falltimes of 2.7 ps when excited by a 0.7-ps falltime input. Using th ese active probes, we demonstrate both waveform measurements with 2.7- ps risetime and network measurements to 200 GHz, We discuss the probe tip and NWA IC design, the hybrid assembly and mechanical design, and system design considerations, On-wafer waveform and S-parameter measur ements of monolithic millimeter-wave integrated circuits are demonstra ted.