GAS-PHASE PYROLYSIS OF TERT-BUTYL(ALLYL) SELENIUM, A NEW PRECURSOR FOR ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION OF ZNSE

Citation
M. Danek et al., GAS-PHASE PYROLYSIS OF TERT-BUTYL(ALLYL) SELENIUM, A NEW PRECURSOR FOR ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION OF ZNSE, Chemistry of materials, 7(4), 1995, pp. 731-737
Citations number
35
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
ISSN journal
08974756
Volume
7
Issue
4
Year of publication
1995
Pages
731 - 737
Database
ISI
SICI code
0897-4756(1995)7:4<731:GPOTSA>2.0.ZU;2-F
Abstract
The gas-phase pyrolysis mechanism of tert-butyl(allyl)selenium (tBASe) , a new organometallic chemical vapor deposition (OMCVD) precursor for ZnSe, was probed under reduced pressure flow conditions by molecular beam mass spectrometry (MBMS). The precursor decomposed in a hydrogen carrier gas above 180 degrees C to selenium, propene, 2-methylpropene, 2-methylpropane, 1,5-hexadiene, diallylselenium (DASe), and hydrogen selenide. Pyrolysis in deuterium did not result in any isotope exchang e between the carrier gas and pyrolysis products. A mechanism involvin g beta-hydrogen transfer and homolysis of the Se-C bonds as the primar y decomposition pathways is proposed. Copyrolysis of tBASe with dimeth ylzinc (DMZn) in hydrogen yielded methane, propene, 2-methylpropene, 1 ,5-hexadiene, methyl(allyl)selenium (MASe), and dimethylselenium (DMSe ) as the major volatile products. The underlying mechanism for formati on of selenium byproducts is described, and the impact of the pyrolysi s chemistry on growth and carbon incorporation is discussed.