IN-SITU THIN-FILM THICKNESS MEASUREMENT WITH ACOUSTIC LAMB WAVES

Authors
PEI J DEGERTEKIN FL KHURIYAKUB BT SARASWAT KC
Citation
J. Pei et al., IN-SITU THIN-FILM THICKNESS MEASUREMENT WITH ACOUSTIC LAMB WAVES, Applied physics letters, 66(17), 1995, pp. 2177-2179
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
17
Year of publication
1995
Pages
2177 - 2179
Database
ISI
SICI code
0003-6951(1995)66:17<2177:ITTMWA>2.0.ZU;2-N