EXTENDED X-RAY-ABSORPTION FINE-STRUCTURE ANALYSIS OF THE DIFFERENCE IN LOCAL-STRUCTURE OF TANTALUM OXIDE CAPACITOR FILMS PRODUCED BY VARIOUS ANNEALING METHODS

Authors
KIMURA H MIZUKI J KAMIYAMA S SUZUKI H
Citation
H. Kimura et al., EXTENDED X-RAY-ABSORPTION FINE-STRUCTURE ANALYSIS OF THE DIFFERENCE IN LOCAL-STRUCTURE OF TANTALUM OXIDE CAPACITOR FILMS PRODUCED BY VARIOUS ANNEALING METHODS, Applied physics letters, 66(17), 1995, pp. 2209-2211
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
17
Year of publication
1995
Pages
2209 - 2211
Database
ISI
SICI code
0003-6951(1995)66:17<2209:EXFAOT>2.0.ZU;2-Y