OPTIMIZATION OF ION-BEAM-INDUCED CHARGE MICROSCOPY FOR THE ANALYSIS OF INTEGRATED-CIRCUITS

Authors
BREESE MBH SAINT A SEXTON FW HOM KM SCHONE H DOYLE BL LAIRD JS LEGGE GJF
Citation
Mbh. Breese et al., OPTIMIZATION OF ION-BEAM-INDUCED CHARGE MICROSCOPY FOR THE ANALYSIS OF INTEGRATED-CIRCUITS, Journal of applied physics, 77(8), 1995, pp. 3734-3741
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
8
Year of publication
1995
Pages
3734 - 3741
Database
ISI
SICI code
0021-8979(1995)77:8<3734:OOICMF>2.0.ZU;2-F