SPUTTERING OF BORON-DOPED GRAPHITE USB15 - INVESTIGATION OF THE ORIGIN OF LOW CHEMICAL EROSION

Authors
SCHWORER R ROTH J
Citation
R. Schworer et J. Roth, SPUTTERING OF BORON-DOPED GRAPHITE USB15 - INVESTIGATION OF THE ORIGIN OF LOW CHEMICAL EROSION, Journal of applied physics, 77(8), 1995, pp. 3812-3817
Citations number
26
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
8
Year of publication
1995
Pages
3812 - 3817
Database
ISI
SICI code
0021-8979(1995)77:8<3812:SOBGU->2.0.ZU;2-G