NATIVE OXIDES ON SI SURFACES OF DEEP-SUBMICRON CONTACT-HOLE BOTTOMS

Authors
AOTO N NAKAMORI M YAMASAKI S HADA H IKARASHI N ISHIDA K TERAOKA Y NISHIYAMA I
Citation
N. Aoto et al., NATIVE OXIDES ON SI SURFACES OF DEEP-SUBMICRON CONTACT-HOLE BOTTOMS, Journal of applied physics, 77(8), 1995, pp. 3899-3907
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
8
Year of publication
1995
Pages
3899 - 3907
Database
ISI
SICI code
0021-8979(1995)77:8<3899:NOOSSO>2.0.ZU;2-G