An extensive TEM study of the microstructure of Be TIP-30 irradiated w
ith 3 and 10 keV D ions up to fluences, Phi, in the range from 3 x 10(
20) to 8 x 10(21) D/m(2) at temperatures, T-irr = 300, 500 and 700 K h
as been carried out. Depth distributions of deuterium in a form of sep
arate D atoms and D-2 molecules have been investigated by means of SIM
S (secondary ion mass spectrometry) and RGA (residual gas analysis) me
thods, correspondingly. D ion implantation is accompanied by blisterin
g and gives rise to processes of gas-induced cavitation which are very
sensitive to the irradiation temperature. At T-irr = 300 K tiny gas b
ubbles (about 1 nm in size) pressurized with molecular deuterium are d
eveloped with parameters resembling those of helium bubbles in Be. Irr
adiation at T-irr greater than or equal to 500 K leads to the appearan
ce of coarse deuterium-filled cavities which can form in sub-surface l
ayers different kinds of oblate labyrinth structures. Questions of ree
mission, thermal desorption and trapping of deuterium in Be have been
discussed.