THE DEPOSITION OF ALPHA-FE2O3 BY AEROSOL CHEMICAL-VAPOR-DEPOSITION

Authors
MARTINEZ A PENA J LABEAU M GONZALEZCALBET JM VALLETREGI M
Citation
A. Martinez et al., THE DEPOSITION OF ALPHA-FE2O3 BY AEROSOL CHEMICAL-VAPOR-DEPOSITION, Journal of materials research, 10(5), 1995, pp. 1307-1311
Citations number
17
Categorie Soggetti
Material Science
Journal title
Journal of materials research → ACNP
ISSN journal
08842914
Volume
10
Issue
5
Year of publication
1995
Pages
1307 - 1311
Database
ISI
SICI code
0884-2914(1995)10:5<1307:TDOABA>2.0.ZU;2-8
Abstract
alpha-Fe2O3 thin films have been deposited on Si(111) substrates at hi gh temperatures (600-800 degrees C) by the spray pyrolysis method, Fou r different iron(III) beta-diketonates have been used as precursors in order to obtain polycrystalline films of good adherence, which have b een characterized by x-ray diffraction, scanning electron microscopy, and magnetic measurements.