The interaction of atomic hydrogen with GaAs(100) surfaces has been st
udied at room temperature by means of photoelectron spectroscopy using
synchrotron radiation. Atomic hydrogen produces drastic changes in th
e line shape of the As3d and Ga3d core levels and changes in the As/Ga
intensity ratio. A least-squares fit routine for line shape analysis
enables the identification of different contributions. They show the b
reaking of Ga-dimers in the low exposure region (<10(2) L) and the for
mation of Ga- and As-hydrides between 10(2) L and 10(4) L. In addition
the build up of metallic Ga-droplets after higher exposures is shown.
The intensity ratio of As3d to Ga3d indicates an As-enrichment due to
Ga-hydride desorption and Ga-droplet formation.