QUANTITATIVE ESTIMATION OF GENERATION RATES OF SI SIO2 INTERFACE DEFECTS BY MEV HE SINGLE-ION IRRADIATION/

Generation rates of the interface defects, namely, the oxide trapped h oles and the interface stales far both n-ch MOSFETs (nMOS) and p-ch MO SFETs (pMOS) by MeV He single ions at zero bias conditions have been i nvestigated quantitatively. The number of oxide trapped holes induced in nMOS and pMOS by 2 MeV He single ion have been estimated to be abou t 17.5 and 8.5, respectively. The number of interface states induced i n nMOS and pMOS have been estimated to be about 6.6 and 2.4, respectiv ely. The difference between nMOS and pMOS in the number of oxide trapp ed holes has been attributed to the difference in the surviving rate o f holes during ion irradiation. By investigating the field-dependence of single ion induced oxide trapped holes, it has been found that the surviving rate of holes generated in oxide layer by ion irradiation fo r 2 MeV He ion varies as a power law dependence on electric field with an exponent of about 0.7 in the range between 0.0 to 2.0 MV/cm at roo m temperature.