STRUCTURE AND MAGNETIC-PROPERTIES OF SPUTTERED ND-FE-B ALLOYS

Studies were conducted on the relationship between the composition of Nd-Fe-B alloys, the temperature of the substrate, additional heat trea tment and magnetic properties, crystalline phases, and microstructure and texture of films 30 to 300 mu m thick produced by ion-plasma sputt ering of cast targets, The sputtering rate was maintained at similar t o 30 mu m/h. The axial crystalline texture (001) along the normal to t he sputtering plane is formed at a sputtering temperature within the l imits ranging from 300 to 450 degrees C and higher than 600 degrees C. In the intermediate domain of sputtering temperatures, there is a det erioration of the texture (001), or such a change of the indices of th e texture when the normal to one of the planes of the zone [010] becom es its axis, Within the framework of the classical theory of crystalli zation, a model of growth texture formation during the course of sputt ering is suggested, The model explains the nonmonotonic change of text ure with the change of sputtering temperature, The data obtained about the structure and properties of films have made it possible to optimi ze the sputtering process with a view to obtaining sputtered magnets w ith very good permanent magnet properties, Examples of magnetic system s and devices with sputtered magnets are given.