GENERATION OF THERMALLY-INDUCED DEFECTS IN BURIED SIO2-FILMS

Authors
ZVANUT ME CHEN TL STAHLBUSH RE STEIGENVALT ES BROWN GA
Citation
Me. Zvanut et al., GENERATION OF THERMALLY-INDUCED DEFECTS IN BURIED SIO2-FILMS, Journal of applied physics, 77(9), 1995, pp. 4329-4333
Citations number
18
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
9
Year of publication
1995
Pages
4329 - 4333
Database
ISI
SICI code
0021-8979(1995)77:9<4329:GOTDIB>2.0.ZU;2-L