DETERMINATION OF ALAS OPTICAL-CONSTANTS BY VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY AND A MULTISAMPLE ANALYSIS

Authors
HERZINGER CM YAO H SNYDER PG CELII FG KAO YC JOHS B WOOLLAM JA
Citation
Cm. Herzinger et al., DETERMINATION OF ALAS OPTICAL-CONSTANTS BY VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY AND A MULTISAMPLE ANALYSIS, Journal of applied physics, 77(9), 1995, pp. 4677-4687
Citations number
34
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
9
Year of publication
1995
Pages
4677 - 4687
Database
ISI
SICI code
0021-8979(1995)77:9<4677:DOAOBV>2.0.ZU;2-F