SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH SIMULTANEOUS ELECTRON-PROBE DIAMETER DETERMINATION

Authors
NOVIKOV YA RAKOV AV STEKOLIN IY
Citation
Ya. Novikov et al., SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH SIMULTANEOUS ELECTRON-PROBE DIAMETER DETERMINATION, Measurement techniques, 37(6), 1994, pp. 710-713
Citations number
7
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
37
Issue
6
Year of publication
1994
Pages
710 - 713
Database
ISI
SICI code
0543-1972(1994)37:6<710:SECWSE>2.0.ZU;2-6
Abstract
A method is proposed for calibrating a scanning electron microscope SE M by means of a slot-type linear measure, which enables one to determi ne simultaneously all the main parameters needed for linear measuremen ts: video image magnification, electron-probe diameter, and the correc tion parameter for deriving the true sizes of relief elements from the distances between video signal peaks.