K. Fujii et al., ABSOLUTE MEASUREMENT OF THE DENSITY OF SILICON-CRYSTALS IN VACUO FOR A DETERMINATION OF THE AVOGADRO CONSTANT, IEEE transactions on instrumentation and measurement, 44(2), 1995, pp. 542-545
An absolute measurement of the density of silicon crystals used for a
determination of Avogadro constant is described. Two 1-kg spheres of n
early perfect geometries were fabricated from a single-crystal silicon
ingot both for measuring their densities and for determining the dens
ity distribution in the ingot. A scanning type optical interferometer
was used to measure their diameters in vacuo. Their volumes were obtai
ned by fitting the diameters to a series of spherical harmonics. Thick
ness of oxide layers on their surfaces was measured by using an ellips
ometer to evaluate its effect on their volumes. The masses of the sphe
res were measured by using a precision balance for the prototype kilog
ram. The relative total uncertainty of the densities, determined by di
rect measurements of their masses and volumes in vacuo, is estimated t
o 1.1 x 10(-7).