CHEMICAL-VAPOR-DEPOSITION OF DIAMOND ONTO IRON-BASED SUBSTRATES - THEUSE OF BARRIER LAYERS

Citation
Ps. Weiser et S. Prawer, CHEMICAL-VAPOR-DEPOSITION OF DIAMOND ONTO IRON-BASED SUBSTRATES - THEUSE OF BARRIER LAYERS, DIAMOND AND RELATED MATERIALS, 4(5-6), 1995, pp. 710-713
Citations number
8
Categorie Soggetti
Material Science
ISSN journal
09259635
Volume
4
Issue
5-6
Year of publication
1995
Pages
710 - 713
Database
ISI
SICI code
0925-9635(1995)4:5-6<710:CODOIS>2.0.ZU;2-Z
Abstract
When Fe is exposed to the plasma environment suitable for the chemical vapour deposition of diamond, the surface is rapidly covered with a t hick layer of graphitic soot and C swiftly diffuses into the Fe substr ate. Once the soot reaches a critical thickness, diamond films nucleat e and grow on top of it. However, adhesion of the film to the substrat e is poor owing to the lack of structural integrity of the soot layer. A thin coating of TIN on the Fe can act to prevent diffusion and soot formation. Diamond readily grows upon the TiN via an a-C interface la yer, but the a-C-TiN interface is weak and delamination occurs at this interface. In order to try and improve the adhesion, the use of a hig h dose Ti implant was investigated to replace the TiN coating.