EFFECT OF ORGANIC PRECURSORS ON DIAMOND NUCLEATION ON SILICON

Citation
M. Ece et al., EFFECT OF ORGANIC PRECURSORS ON DIAMOND NUCLEATION ON SILICON, DIAMOND AND RELATED MATERIALS, 4(5-6), 1995, pp. 720-724
Citations number
23
Categorie Soggetti
Material Science
ISSN journal
09259635
Volume
4
Issue
5-6
Year of publication
1995
Pages
720 - 724
Database
ISI
SICI code
0925-9635(1995)4:5-6<720:EOOPOD>2.0.ZU;2-I
Abstract
Diamond nucleation on silicon substrates is a very slow process unless the substrates are bias treated or scratched with diamond powder prio r to diamond growth under chemical vapor deposition (CVD) conditions. In this report, we present our results concerning the effect of variou s organic coatings on CVD diamond nucleation on Si substrates. Results show that diamond can nucleate readily on Si coated with an organic l ayer even without scratching and biasing. The different organics used on Si became glassy carbon in the early stages of CVD diamond depositi on. The glassy carbon coatings obtained from different organics as wel l as the diamond films grown on the glassy carbon/Si substrates were c haracterized by X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), scanning electron microscopy (SEM) , and Raman spectroscopy. The results are discussed in terms of the fo rmation of glassy carbon which, in turn, enhances diamond nucleation.