STRUCTURE OF SURFACE-MODIFIED LAYERS OF CALCIUM-ION-IMPLANTED TI-6AL-4V AND TI-56NI

The structures of surface-modified layers of calcium-ion (Ca2+)-implan ted Ti-6 mass%Al-4 mass%V and Ti-56 mass%Ni were characterized using A uger electron spectroscopy with argon-ion-sputtering and X-ray photoel ectron spectroscopy. Calcium ions were implanted in Ti-6Al-4V and Ti-5 6Ni in the amount of 10(22) ions/m(2) with an acceleration energy of 2 .88 fJ (18 keV). The surface oxide layers of these alloys grew to appr oximately 12 nm as a result of the Ca2+-implantation. The oxide layers contained hydroxide. The outermost layer of the surface oxide was 3-n m-thick calcium oxy-hydroxide. A large part of the surface-modified la yer, existing inside the calcium oxide, consisted of a mixture of tita nium oxide, aluminum oxide and calcium oxide in Ca2+-implanted Ti-6Al- 4V, and a mixture of titanium oxide, nickel oxide and calcium oxide in Ca2+-implanted Ti-56Ni. In Ca2+-implanted Ti-6Al-4V, Ca2+-free oxide layers existed in the deepest region and this layer consisted of a mix ture of titanium oxide with aluminum oxide, whereas this layer was abs ent in Ca2+-implanted Ti-56Ni.