DEEP ERBIUM-YTTERBIUM IMPLANTATION CODOPING OF LOW-LOSS SILICON OXYNITRIDE WAVE-GUIDES

The authors report the first photoluminescence studies and preliminary loss modulation measurements on low-loss planar silicon oxynitride op tical waveguides co-implanted with Er and Yb. Deep high-dose ion impla ntation is used to create high concentration levels of Er and Yb dopan ts with the concentration profiles adapted to the guided pump mode (98 0nm). It is found that Yb co-implantation at high concentrations (up t o 1 atm.%) only reduces the initial Er I-4(13/2) level lifetime (5.3ms ) by less than 30%, while the 980nm pump absorption is greatly increas ed. Loss modulation at 1.5 mu m is detected in planar waveguides, thus indicating further possibility of using Er/Yb codoped SiON waveguides in active integrated optoelectronics.