CONTACT AND SHEET RESISTANCES OF SNO2 THIN-FILMS FROM TRANSMISSION-LINE MODEL MEASUREMENTS

Authors
HOEFER U STEINER K WAGNER E
Citation
U. Hoefer et al., CONTACT AND SHEET RESISTANCES OF SNO2 THIN-FILMS FROM TRANSMISSION-LINE MODEL MEASUREMENTS, Sensors and actuators. B, Chemical, 26(1-3), 1995, pp. 59-63
Citations number
12
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
26
Issue
1-3
Year of publication
1995
Pages
59 - 63
Database
ISI
SICI code
0925-4005(1995)26:1-3<59:CASROS>2.0.ZU;2-#
Abstract
Sheet and contact resistances of thin-film SnO2 gas sensors have been evaluated in different gas atmospheres using transmission-line model m easurements. The modified sheet resistance close to the electrode/meta l oxide interface exhibits the strongest response due to CO or NO2 gas reactions. The systematic variation of contact separations and SnO2 l ayer widths gives an idea for the design of simple and low-cost integr ated sensor arrays. There is no necessity to modify each sensor of the array with different dopants or catalysts.