The thermophoretic efficiency in the modified chemical vapour depositi
on process has been experimentally studied under conditions of changin
g temperature and velocity field in the silica deposition tube. The co
oling of the tube by a stream of air, deposition under the reverse tor
ch traverse and induction of a circular flow in the tube have been stu
died. Results of the experiments were explained on the basis of the Wa
lker thermophoretic model and under the assumption that the amount of
the deposited glass is determined by chemical equilibrium. Considerabl
e increase of the overall thermophoretic efficiency was observed when
cooling by the air stream was used. The derived theoretical model can
account for these results.