Si. Zheludeva et al., NEW METHOD OF ULTRA-THIN FILM CHARACTERIZATION APPLIED TO THE INVESTIGATION OF C NI/C STRUCTURES UNDER HEAT LOAD/, Thin solid films, 259(2), 1995, pp. 131-138
A new technique for measuring the thickness and density of ultra-thin
films has been developed. Films of the order of tens of angstroms have
been studied by using a combination of X-ray standing waves generated
in layered synthetic microstructures (LSM) and near-total external fl
uorescence study. The technique has been used to study C/Ni/C trilayer
s (deposited on Cr/C and W/C LSM) under heat load. It was found that v
ariation on Ni and C layer parameters at elevated temperatures is affe
cted primarily by the deposition conditions.