S. Pence et al., SUBSTRATE-TEMPERATURE EFFECTS ON THE ELECTRICAL-PROPERTIES OF CDS FILMS PREPARED BY CHEMICAL SPRAY-PYROLYSIS, Materials letters, 23(1-3), 1995, pp. 13-16
Films of CdS typically 0.3 mu m thick, grown on glass substrates at 35
0 degrees C, 400 degrees C and 450 degrees C by chemical spray pyrolys
is (CSP) show n-type resitivities of 10(2) Ohm cm at 350 degrees C and
> 10(5) Ohm cm at 400 degrees C and 450 degrees C respectively. This
resistivity increase with temperature is attributed to decreasing amou
nts of chlorine remaining in these films as a byproduct of the CSP pro
cess and is consistent with the known n-type dopant behavior of chlori
ne in this system.