SOFT-X-RAY PHASE MODULATION MULTILAYER DISPERSIVE ELEMENT

Authors
YUAN LX FAN ZX CUL MQ FU SJ
Citation
Lx. Yuan et al., SOFT-X-RAY PHASE MODULATION MULTILAYER DISPERSIVE ELEMENT, Optical engineering, 34(5), 1995, pp. 1508-1511
Citations number
9
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
34
Issue
5
Year of publication
1995
Pages
1508 - 1511
Database
ISI
SICI code
0091-3286(1995)34:5<1508:SPMMDE>2.0.ZU;2-Y
Abstract
Multilayer phase gratings have higher diffraction efficiency than ampl itude gratings in the soft x-ray region. The authors give a detailed d escription of the fabrication, characterization, and performance of so ft x-ray phase modulation multilayer laminar gratings. The experimenta l results are discussed and compared with theory.