V-GROOVE GRATINGS ON SILICON FOR INFRARED BEAM SPLITTING

Authors
RAJKUMAR N MCMULLIN JN
Citation
N. Rajkumar et Jn. Mcmullin, V-GROOVE GRATINGS ON SILICON FOR INFRARED BEAM SPLITTING, Applied optics, 34(14), 1995, pp. 2556-2559
Citations number
10
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
34
Issue
14
Year of publication
1995
Pages
2556 - 2559
Database
ISI
SICI code
0003-6935(1995)34:14<2556:VGOSFI>2.0.ZU;2-H
Abstract
Infrared beam-splitting transmission gratings that utilize anisotropic ally etched v-grooves on silicon wafers are proposed. With scalar diff raction theory to find the amplitudes of the different diffraction ord ers, a numerical search is used to find optimum designs for 1:3, 1:5, and 1:7 splitters with efficiencies greater than 70% with a standard d eviation in intensity of no more than 7%.