INTERFACE ROUGHNESS IN SURFACE-SENSITIVE X-RAY-METHODS

X-ray reflection, strongly asymmetric x-ray diffraction and grazing in cidence x-ray diffraction are extremely sensitive to the state of inte rfaces of a layered sample. Random structural defects at the interface s give rise to diffuse x-ray scattering. In this paper, the diffuse x- ray scattering in all three arrangements has been described within a u niform formalism by means of a distorted-wave Born approximation that includes dynamical phenomena influencing the scattering process. The t heory has been used for calculating the diffuse scattering from random ly rough multilayers in all these experimental arrangements. In the ca se of x-ray reflectivity, the results have been compared with experime nts and good agreement has been achieved.