NON-SPECULAR X-RAY-SCATTERING FROM THIN-FILMS AND MULTILAYERS WITH SMALL-ANGLE SCATTERING EQUIPMENT

Authors
SALDITT T METZGER TH PEISL J GOERIGK G
Citation
T. Salditt et al., NON-SPECULAR X-RAY-SCATTERING FROM THIN-FILMS AND MULTILAYERS WITH SMALL-ANGLE SCATTERING EQUIPMENT, Journal of physics. D, Applied physics, 28(4A), 1995, pp. 236-240
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of physics. D, Applied physics → ACNP
ISSN journal
00223727
Volume
28
Issue
4A
Year of publication
1995
Pages
236 - 240
Database
ISI
SICI code
0022-3727(1995)28:4A<236:NXFTAM>2.0.ZU;2-8
Abstract
We present measurements of non-specular x-ray scattering from rough in terfaces at a dedicated small-angle scattering beamline that allows fo r very low divergence of the incident beam and therefore for high reso lution close to the specularly reflected beam. A two-dimensional detec tor is used to measure the non-specular intensity both in and out of t he plane of reflection. The method is exemplified by an Au single laye r, an amorphous Nb/Al2O3 multilayer and an epitaxial GaAs/AlAs superla ttice sample.