El. Brosha et al., IN SITU GROWTH AND CHARACTERIZATION OF LA0.8SR0.2COO3 PEROVSKITE MIXED CONDUCTOR FILMS, Journal of the Electrochemical Society, 142(5), 1995, pp. 1702-1705
We have grown thin films of La0.3Sr0.2CoO3 on SrTiO3 [100], MgO [100],
yttrium-stabilized zirconia YSZ [100], and CeO2 [100]/Al2O3 substrate
s by using a 90 degrees off-axis RF magnetron sputtering deposition. X
-ray diffraction analysis reveals that, depending on substrate, the de
posited films grew either epitaxially or highly textured. Scanning tun
neling microscopy reveals that the thin films grow with a smooth surfa
ce and with different growth mechanisms according to substrate. For La
0.6Sr0.2CoO3 thin films grown on MgO [100], the low values of the chan
neling minimum yield from Rutherford backscattering spectroscopy indic
ated excellent epitaxy with the substrate.