By means of atomic force microscopy, we have investigated the surfaces
of SrTiO3(001) substrates (used for the growth of high-T-c supercondu
cting films) after different heat treatments. These treatments were (i
) annealing in O-3, (ii) annealing in O-2, (iii) annealing in O-3 foll
owed by deposition of SrTiO3, and (iv) annealing in UHV. Our results s
uggest that, independently of the type of annealing, the surfaces of t
he polished SrTiO3 substrates rearrange, either by diffusion or desorp
tion of atoms, until reaching the energetically most favourable surfac
e structure. For vicinal (001) substrates, this equilibrium structure
corresponds to atomically flat terraces separated by smooth steps of o
ne unit-cell in height, with the orientation and width of the terraces
being determined by the miscut of the substrate. However, the kinetic
s involved in the reconstruction of the SrTiO3 surface were observed t
o be strongly dependent on the annealing conditions. In particular, th
e use of O-3 instead of O-2 or UHV was found to accelerate the reconst
ruction of the SrTiO3 surface. Finally, this study provides an accurat
e characterisation of the defects present on SrTiO3 substrates.