PREPARATION OF (100)-ORIENTED METALLIC LANIO3 THIN-FILMS ON SI SUBSTRATES BY RADIO-FREQUENCY MAGNETRON SPUTTERING FOR THE GROWTH OF TEXTURED PB(ZR0.53TI0.47)O-3

Authors
YANG CC CHEN MS HONG TJ WU CM WU JM WU TB
Citation
Cc. Yang et al., PREPARATION OF (100)-ORIENTED METALLIC LANIO3 THIN-FILMS ON SI SUBSTRATES BY RADIO-FREQUENCY MAGNETRON SPUTTERING FOR THE GROWTH OF TEXTURED PB(ZR0.53TI0.47)O-3, Applied physics letters, 66(20), 1995, pp. 2643-2645
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
20
Year of publication
1995
Pages
2643 - 2645
Database
ISI
SICI code
0003-6951(1995)66:20<2643:PO(MLT>2.0.ZU;2-6