CALIBRATING A SCANNING ELECTRON-MICROSCOPE BY MEANS OF A LINEAR MEASURE HAVING ONE CERTIFIED DIMENSION

Authors
NOVIKOV YA RAKOV AV STEKOLIN IY
Citation
Ya. Novikov et al., CALIBRATING A SCANNING ELECTRON-MICROSCOPE BY MEANS OF A LINEAR MEASURE HAVING ONE CERTIFIED DIMENSION, Measurement techniques, 37(7), 1994, pp. 841-844
Citations number
7
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
37
Issue
7
Year of publication
1994
Pages
841 - 844
Database
ISI
SICI code
0543-1972(1994)37:7<841:CASEBM>2.0.ZU;2-G
Abstract
A method is proposed for calibrating a scanning electron microscope th at enables one to use a linear measure with a single certified dimensi on to determine all the basic parameters needed for making linear meas urements: image magnification, electron-probe diameter, and correction parameter for deriving the true dimensions of relief elements from th e distance between video-signal maxima.