EVOLUTION OF THE DENSITY OF GRAPHITE-LIKE DEFECTS DURING CVD DIAMOND GROWTH

In order to quantitatively measure the quality of CVD diamond by Raman spectroscopy the spectra of diamond films were decomposed into Raman peaks and luminescence bands. The evolution of the diamond and ''G-ban d'' Raman peaks were studied as a function of film thickness for two d ifferent growth morphologies. A normalization procedure was used to el iminate the effects on signal intensities of varying probe size, light absorption and scattering. Electron spin resonance was applied to sca le normalized peak intensities in terms of defect densities. The grain structure of the thin films strongly affects the normalized G-band in tensity. It is demonstrated that graphite-like defects are concentrate d in grain boundaries.