PLASMA IMMERSION ION-IMPLANTATION (PIII) OF METALS

Plasma Immersion Ion Implantation (PIII) is a new hybrid technology fo r surface treatment of materials based on the principles of plasma nit riding and ion implantation. The equipment and the operation of the sy stem are introduced. As well as providing an alternate method of ion i mplantation, it is possible to combine energetic ion bombardment with plasma nitriding. Different metal materials and treatment conditions h ave been studied. The capability of PIII-treatment to improve the prop erties of a wide range of metals has been proven. Application to formi ng tools and their industrial test has been successful.