The microwave plasma-assisted chemical vapor deposition (CVD) techniqu
e has been used to grow a polycrystalline diamond thin film over silic
on substrate. Reactant gases of methane and hydrogen were used in the
diamond CVD process. We have performed a feasibility test on the possi
ble applicability of diamond and diamond-like carbon thin films for sp
ace protective applications against artificially simulated hyperveloci
ty impact of micrometeoroid particles of olivine. As-deposited films w
ere analyzed by Raman and scanning electron microscopy for their chemi
cal nature and morphology respectively.