INTERPRETATION OF DEPTH PROFILES OBTAINED BY DC-GLOW DISCHARGE SPUTTERING

Authors
CERMAK J STLOUKAL I
Citation
J. Cermak et I. Stloukal, INTERPRETATION OF DEPTH PROFILES OBTAINED BY DC-GLOW DISCHARGE SPUTTERING, Physica status solidi. a, Applied research, 158(2), 1996, pp. 397-404
Citations number
14
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
158
Issue
2
Year of publication
1996
Pages
397 - 404
Database
ISI
SICI code
0031-8965(1996)158:2<397:IODPOB>2.0.ZU;2-S
Abstract
Penetration profiles obtained by de-glow discharge sputtering are inte rpreted. An analytical formula is proposed that accounts for the influ ence of knock-on effect upon the observed shape of the profile and ena bles the evaluation of the coefficient of volume diffusion at low temp eratures. For the illustration of the theoretical conclusions, some ch osen experimental curves obtained for the case of Ni-63 diffusion in N i3Al are processed.