SMALL FREE-ENERGY BARRIER AND POSTDESORPTION COLLISIONS - THE KEYS TOWARDS THE UNDERSTANDING OF REACTIVE ION ETCHING OF SILICON

Authors
FEIL H
Citation
H. Feil, SMALL FREE-ENERGY BARRIER AND POSTDESORPTION COLLISIONS - THE KEYS TOWARDS THE UNDERSTANDING OF REACTIVE ION ETCHING OF SILICON, Physical review letters, 74(10), 1995, pp. 1879-1882
Citations number
19
Categorie Soggetti
Physics
Journal title
Physical review letters → ACNP
ISSN journal
00319007
Volume
74
Issue
10
Year of publication
1995
Pages
1879 - 1882
Database
ISI
SICI code
0031-9007(1995)74:10<1879:SFBAPC>2.0.ZU;2-P