EQUIPMENT FRONTIERS - SURFACE-RESISTANCE ANALYSIS - A NEW THIN-FILM CHARACTERIZATION TOOL

Authors
MARTENS JS GARRISON SM SACHTJEN SA
Citation
Js. Martens et al., EQUIPMENT FRONTIERS - SURFACE-RESISTANCE ANALYSIS - A NEW THIN-FILM CHARACTERIZATION TOOL, Solid state technology, 37(12), 1994, pp. 51-54
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
12
Year of publication
1994
Pages
51 - 54
Database
ISI
SICI code
0038-111X(1994)37:12<51:EF-SA->2.0.ZU;2-I