ION-BEAM AND LASER-ASSISTED MICROMACHINING OF SINGLE-CRYSTAL DIAMOND

Authors
HUNN JD CHRISTENSEN CP
Citation
Jd. Hunn et Cp. Christensen, ION-BEAM AND LASER-ASSISTED MICROMACHINING OF SINGLE-CRYSTAL DIAMOND, Solid state technology, 37(12), 1994, pp. 57-60
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
12
Year of publication
1994
Pages
57 - 60
Database
ISI
SICI code
0038-111X(1994)37:12<57:IALMOS>2.0.ZU;2-T
Abstract
A technique for producing free-standing, single-crystal diamond micros tructures from homoepitaxial films has been demonstrated. This simple preparation method for miniature parts makes diamond a reasonable alte rnative to the more common silicon-based micromechanical devices that have been produced over the past few years.