ULTRA-CLEAN OR JUST-CLEAN-ENOUGH TECHNOLOGY

Authors
HEYNS M
Citation
M. Heyns, ULTRA-CLEAN OR JUST-CLEAN-ENOUGH TECHNOLOGY, Solid state technology, 37(12), 1994, pp. 128
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
12
Year of publication
1994
Database
ISI
SICI code
0038-111X(1994)37:12<128:UOJT>2.0.ZU;2-J