IN-SITU OPTICAL DIAGNOSIS ON HYDROGENATED AMORPHOUS-SILICON GROWN BY VIBRATION SUPERIMPOSED PLASMA CHEMICAL-VAPOR-DEPOSITION

Authors
NAITO N TAKANO A SUMIYA M KAWASAKI M KOINUMA H
Citation
N. Naito et al., IN-SITU OPTICAL DIAGNOSIS ON HYDROGENATED AMORPHOUS-SILICON GROWN BY VIBRATION SUPERIMPOSED PLASMA CHEMICAL-VAPOR-DEPOSITION, Applied physics letters, 66(9), 1995, pp. 1071-1073
Citations number
8
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
9
Year of publication
1995
Pages
1071 - 1073
Database
ISI
SICI code
0003-6951(1995)66:9<1071:IODOHA>2.0.ZU;2-A