STUDY OF SECONDARY-ELECTRON EMISSION FROM PLASMA-POLYMERIZED MATERIALS

Authors
NOVAK S HRACH R CALUSINSKI B
Citation
S. Novak et al., STUDY OF SECONDARY-ELECTRON EMISSION FROM PLASMA-POLYMERIZED MATERIALS, International journal of electronics, 78(1), 1995, pp. 139-142
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
International journal of electronics → ACNP
ISSN journal
00207217
Volume
78
Issue
1
Year of publication
1995
Pages
139 - 142
Database
ISI
SICI code
0020-7217(1995)78:1<139:SOSEFP>2.0.ZU;2-2
Abstract
Results of electron-electron secondary emission measurements of plasma polymerized thin films of benzene at very small energies (below 30 eV ) are presented. The importance for probe diagnostics of particle inte raction with solid surfaces in a chemically active plasma is shown. Th e acquired data are used in a computer model of chemically active plas ma to demonstrate the influence of the interaction.