TAPPING MODE CAPACITANCE MICROSCOPY

We present a new technique for microscopic capacitance measurements. C apacitance microscopy is combined with tapping mode force microscopy. The tapping motion is successfully used for the capacitance modulation and also for the tip-sample distance regulation. Furthermore, capacit ive and topographic images are simultaneously obtained. The technique was applied to observations of a gratinglike electrode and of a nitrid e-oxide-silicon structure for a nonvolatile memory. (C) 1997 American Institute of Physics.