Hp. Rust et al., HIGH-PRECISION MECHANICAL APPROACH MECHANISM FOR A LOW-TEMPERATURE SCANNING TUNNELING MICROSCOPE, Review of scientific instruments, 68(1), 1997, pp. 129-132
A novel mechanical micropositioner has been developed for producing ex
act linear displacements in the nm range. Incorporated in a low temper
ature scanning tunneling microscope (STM), it is used as a coarse appr
oach mechanism for the tunneling tip. The advantage of the design is t
he high accuracy of the linear motion and the absence of backlash. The
design principle is discussed and its positioning accuracy and stabil
ity for STM imaging are demonstrated. (C) 1997 American Institute of P
hysics.