Projection optics is a means to reduce the spatial energy density vari
ations on the target during laser ablation. Using projection optics to
study the interaction between a spatially uniform 248 nm excimer lase
r beam and a YBa2Cu3O6+x target we observe a well-defined threshold fl
uence of 1.0 J/cm(2). Below this threshold non-stoichiometric ablation
results in an dramatic change in target morphology and in a decay of
the ablation rate. Above this threshold the stoichiometry of the targe
t is conserved. The roughness of the deposited films increases along w
ith the increase in roughness of the target above the threshold. Thus
it is clear that in order to obtain flat stoichiometric films one shou
ld use a narrow fluence window just above the threshold.