METAL PATTERN DEPOSITION BY LASER-INDUCED FORWARD TRANSFER

Results of a systematic study on laser-induced transfer of metal patte rns are summarized. The pulse width of the lasers used in the experime nts was scaled from a few nanoseconds to one millisecond to discover t he different time-dependent processes determining ablation and transfe r of thin films of a variety of metals. The physical events were follo wed by optical and electron microscopy and static and time-resolved op tical measurements, as well as ultrafast photography. The main conclus ion is that the adhesive properties of the interface between the metal film and the support, and the thermophysical characteristics of both the support and target substrates determine the yield of the transfer. Optimum parameter sets ensuring deposition of well adhering micromete r-sized patterns faithfully reproducing the illuminating area were det ermined. The technological importance of this novel technique is point ed out.