COMBINATION OF EXCIMER-LASER MICROMACHINING AND REPLICATION PROCESSESSUITED FOR LARGE-SCALE PRODUCTION

Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electrop lating process and second inverse replication by injection moulding (' 'Laser-LIGA''). Thus, the original microstructures, made from PMMA and novolak layers applying a commercial 193 nm excimer laser micromachin ing work-station and showing structural variety and aspect ratios up t o 10, were replicated with high structural fidelity by a law cost proc ess suited for large scale production.