TAILORING OF SURFACE-PROPERTIES BY REMOVAL AND DEPOSITION WITH LASER-RADIATION

Authors
KREUTZ EW FRERICHS H MERTIN M WESNER DA PFLEGING W
Citation
Ew. Kreutz et al., TAILORING OF SURFACE-PROPERTIES BY REMOVAL AND DEPOSITION WITH LASER-RADIATION, Applied surface science, 86(1-4), 1995, pp. 266-277
Citations number
27
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
86
Issue
1-4
Year of publication
1995
Pages
266 - 277
Database
ISI
SICI code
0169-4332(1995)86:1-4<266:TOSBRA>2.0.ZU;2-7
Abstract
The tailoring of chemical, morphological, and mechanical surface prope rties with laser radiation is described on the basis of the understand ing and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition o f multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.