Ym. Lian et al., EFFECTS OF SURFACE TREATMENTS AND DEPOSITION CONDITIONS ON THE ADHESION OF SILICON DIOXIDE THIN-FILM ON POLYMETHYLMETHACRYLATE, Surface & coatings technology, 71(2), 1995, pp. 142-150
Factors influencing the adhesion of silicon dioxide thin film on polym
ethylmethacrylate (PMMA) were studied. The effects of cleaning, plasma
treatment, antistatic treatment, outgas treatment and chromium coatin
g on the adhesion were studied using a five factor and two level L(16)
experimental design. The chromium coating had a maximum effect on the
adhesion, as confirmed from the L(16) experimental data. The effects
of glow discharge treatment, vacuum pressure and deposition rate on th
e adhesion were also studied using a three factor and two level L(4) e
xperimental design. The glow discharge treatment had a major effect on
the adhesion of silicon dioxide thin film, with the vacuum pressure a
nd deposition rate having a minor effect on the adhesion. The surface
chemistry and topography of PMMA were changed after glow discharge tre
atment, as revealed by surface characterization using X-ray photoelect
ron spectroscopy, secondary ion mass spectroscopy and atomic force mic
roscopy.