EFFECTS OF SURFACE TREATMENTS AND DEPOSITION CONDITIONS ON THE ADHESION OF SILICON DIOXIDE THIN-FILM ON POLYMETHYLMETHACRYLATE

Factors influencing the adhesion of silicon dioxide thin film on polym ethylmethacrylate (PMMA) were studied. The effects of cleaning, plasma treatment, antistatic treatment, outgas treatment and chromium coatin g on the adhesion were studied using a five factor and two level L(16) experimental design. The chromium coating had a maximum effect on the adhesion, as confirmed from the L(16) experimental data. The effects of glow discharge treatment, vacuum pressure and deposition rate on th e adhesion were also studied using a three factor and two level L(4) e xperimental design. The glow discharge treatment had a major effect on the adhesion of silicon dioxide thin film, with the vacuum pressure a nd deposition rate having a minor effect on the adhesion. The surface chemistry and topography of PMMA were changed after glow discharge tre atment, as revealed by surface characterization using X-ray photoelect ron spectroscopy, secondary ion mass spectroscopy and atomic force mic roscopy.